{"@context":{"owl":"http://www.w3.org/2002/07/owl#","bibo":"http://purl.org/ontology/bibo/","foaf":"http://xmlns.com/foaf/0.1/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/"},"@id":"https://ci.nii.ac.jp/ncid/BB15787821.json","@graph":[{"@id":"https://ci.nii.ac.jp/ncid/BB15787821#entity","@type":"bibo:Book","foaf:isPrimaryTopicOf":{"@id":"https://ci.nii.ac.jp/ncid/BB15787821.json"},"dc:title":[{"@value":"半導体プロセスガス安全データ集"},{"@value":"ハンドウタイ プロセス ガス アンゼン データシュウ","@language":"ja-hrkt"}],"dc:creator":"特殊ガス工業会,SEMIスタンダード設備・安全性部会共著","dc:publisher":[{"@value":"SEMIジャパン"}],"dcterms:extent":"294p","cinii:size":"26cm","dc:language":"jpn","dc:date":"1993","cinii:ncid":"BB15787821","prism:edition":"増補改訂版","cinii:ownerCount":"0","foaf:maker":[{"@id":"https://ci.nii.ac.jp/author/DA18004012#entity","@type":"foaf:Person","foaf:name":[{"@value":"特殊ガス工業会"},{"@value":"トクシュ ガス コウギョウカイ","@language":"ja-hrkt"}]},{"@id":"https://ci.nii.ac.jp/author/DA18004023#entity","@type":"foaf:Person","foaf:name":[{"@value":"SEMIジャパン"},{"@value":"SEMI ジャパン","@language":"ja-hrkt"}]}],"prism:publicationDate":["1993.7"],"dc:subject":["NDC8:549.8","NDLC:ND371"],"foaf:topic":[{"@id":"https://ci.nii.ac.jp/books/search?q=%E5%8D%8A%E5%B0%8E%E4%BD%93","dc:title":"半導体"}]}]}