Poly-SiGe for MEMS-above-CMOS Sensors

Author(s)

• González Ruiz, Pilar
• Meyer, Kristin De
• Witvrouw, Ann

Bibliographic Information

Poly-SiGe for MEMS-above-CMOS Sensors

Pilar Gonzalez Ruiz, Kristin De Meyer, Ann Witvrouw

（Advanced microelectronics, 44）

Springer, c2014

Details

• NCID: BB15832449
• ISBN:
  • 9789400767980
• LCCN: 2013940084
• Country Code: ne
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Dordrecht
• Pages/Volumes: xvi, 199 p.
• Size: 25 cm
• Classification:
  • LCC : TK7875
• Subject Headings:
  • LCSH : Engineering
  • LCSH : Systems engineering
  • LCSH : Optical materials
  • LCSH : Surfaces (Physics)
  • LCSH : Physics
• Parent Bibliography ID:
  • BA41247416