Enabling technology for MEMS and nanodevices

Author(s)

• Baltes, H. (Henry)

Bibliographic Information

Enabling technology for MEMS and nanodevices

edited by Henry Baltes...[et al.]

（Advanced micro & nanosystems）

Wiley-VCH, c2013

Note

Includes bibliographical references and index

"First edition 2004"--t.p.verso

Other authors : Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata

Details

• NCID: BB16009446
• ISBN:
  • 9783527334988
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Weinheim
• Pages/Volumes: xii, 427 p.
• Size: 24 cm
• Classification:
  • DC22 : 620.5
• Subject Headings:
  • LCSH : Microelectromechanical systems
  • LCSH : Nanotechnology
• Parent Bibliography ID:
  • BA70371204