Gettering and defect engineering in semiconductor technology : GADEST 2003 : proceedings of the 10th International Autumn Meeting, Seehotel Zeuthen (suburb of Berlin) State of Brandenburg, Germany, September 21-26, 2003

著者

• International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology
• Richter, H.
• Kittler, M.

書誌事項

Gettering and defect engineering in semiconductor technology : GADEST 2003 : proceedings of the 10th International Autumn Meeting, Seehotel Zeuthen (suburb of Berlin) State of Brandenburg, Germany, September 21-26, 2003

edited by H. Richter and M. Kittler

（Diffusion and defect data : solid state data, Pt. B . Solid state phenomena ; v. 95-96）

Scitec Publications, c2004

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BB16175274
• ISBN:
  • 9783908450825
• 出版国コード: sz
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Uetikon-Zurich, Switzerland
• ページ数/冊数: xvi, 682 p.
• 大きさ: 25 cm
• 親書誌ID:
  • BA07841800