Gettering and defect engineering in semiconductor technology : GADEST 2003 : proceedings of the 10th International Autumn Meeting, Seehotel Zeuthen (suburb of Berlin) State of Brandenburg, Germany, September 21-26, 2003

Author(s)

• International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology
• Richter, H.
• Kittler, M.

Bibliographic Information

Gettering and defect engineering in semiconductor technology : GADEST 2003 : proceedings of the 10th International Autumn Meeting, Seehotel Zeuthen (suburb of Berlin) State of Brandenburg, Germany, September 21-26, 2003

edited by H. Richter and M. Kittler

（Diffusion and defect data : solid state data, Pt. B . Solid state phenomena ; v. 95-96）

Scitec Publications, c2004

Note

Includes bibliographical references and index

Details

• NCID: BB16175274
• ISBN:
  • 9783908450825
• Country Code: sz
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Uetikon-Zurich, Switzerland
• Pages/Volumes: xvi, 682 p.
• Size: 25 cm
• Parent Bibliography ID:
  • BA07841800