Micro- and nanoscale systems - novel materials, structures and devices : symposium held December 1-6, 2013, Boston, Massachusetts, U.S.A.

Author(s)

• Microelectromechanical System - Materials and Devices
• Materials Research Society. Meeting
• Boeckl, John J.
• Candler, Robert N.
• DelRio, Frank W.
• Morral, Anna Fontcuberta i
• Jagadish, Chennupati
• Keimei, Chris
• Silva, Helena
• Voss, Tobias
• Xiong, Qihua

Bibliographic Information

Micro- and nanoscale systems - novel materials, structures and devices : symposium held December 1-6, 2013, Boston, Massachusetts, U.S.A.

editors, John J. Boeckl ...[et al.]

（Materials Research Society symposium proceedings, v. 1659）

Materials Research Society , Cambridge University Press, 2014

• : hbk.

Note

"Symposium XX, 'Microelectromechanical System - Materials and Devices,' held from December 2 to December 4, 2013 at the MRS Fall Meeting, ..." --preface

Includes bibliographical references and indexes

Other editors: Robert N. Candler, Frank W. DelRio, Anna Fontcuberta i Morral, Chennupati Jagadish, Chris Keimei, Helena Silva, Tobias Voss, Qihua Xiong

Details

• NCID: BB16858889
• ISBN:
  • 9781605116365
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Warrendale, Pa.,N.Y.
• Pages/Volumes: xi, 235 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA00013775