VHF and Microwave Discharge Plasmas: Surface Heating of Plasmas at VHF and Microwave Frequency in Advanced Materials Processing

Author(s)

Bibliographic Information

VHF and Microwave Discharge Plasmas: Surface Heating of Plasmas at VHF and Microwave Frequency in Advanced Materials Processing

Essam Abdel Fattah, Hideo Sugai

VDM Verlag Dr. Müller, 2010

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Note

Includes bibliographical references (p. 141-142)

Details

  • NCID
    BB17096708
  • ISBN
    • 9783639241488
  • Country Code
    gw
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Saarbrücken
  • Pages/Volumes
    vi, 152 p.
  • Size
    22 cm
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