System-level modeling of MEMS

Author(s)

• Bechtold, Tamara
• Schrag, Gabriele
• Feng, Lihong

Bibliographic Information

System-level modeling of MEMS

edited by Tamara Bechtold, Gabriele Schrag, and Lihong Feng

（Advanced micro & nanosystems, Vol. 10）

Wiley-VCH, c2013

Note

Includes bibliographical references and index

Details

• NCID: BB1735967X
• ISBN:
  • 9783527319039
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Weinheim
• Pages/Volumes: xxxii, 530 p.
• Size: 25 cm
• Classification:
  • DC23 : 621.381
• Subject Headings:
  • LCSH : Microelectromechanical systems
  • LCSH : Microelectromechanical systems -- Mathematical models
• Parent Bibliography ID:
  • BA70371204