System-level modeling of MEMS

Author(s)

    • Bechtold, Tamara
    • Schrag, Gabriele
    • Feng, Lihong

Bibliographic Information

System-level modeling of MEMS

edited by Tamara Bechtold, Gabriele Schrag, and Lihong Feng

(Advanced micro & nanosystems, Vol. 10)

Wiley-VCH, c2013

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Includes bibliographical references and index

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