A laser scanner for semiconductor devices

Author(s)

• Sawyer, David E.
• Berning, David W.

Bibliographic Information

A laser scanner for semiconductor devices

David E. Sawyer and David W. Berning

（NBS special publication, 400-24 . Semiconductor measurement technology）

U.S. G.P.O., 1977

Access to Electronic Resource 2 items

• A laser scanner for semiconductor devices / David E. Sawyer and David W. Berning.

  1977

  HathiTrust

  

• A laser scanner for semiconductor devices / David E. Sawyer and David W. Berning. (400-24)

  1977

  HathiTrust

  

Details

• NCID: BB18576753
• LCCN: 76608408
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Washington
• Pages/Volumes: vii, 64 p.
• Size: 26 cm
• Classification:
  • LCC : QC100
  • LCC : TK7882.S3
  • DC : 602/.1 s
  • DC : 621.3815/48
• Subject Headings:
  • LCSH : Optical scanners
  • LCSH : Semiconductor industry -- Laser use in
  • LCSH : Semiconductors -- Testing
• Parent Bibliography ID:
  • BA0011083X