Techniques for measuring the integrity of passivation overcoats on integrated circuits

Author(s)

• Kern, Werner
• Comizzoli, Robert B.

Bibliographic Information

Techniques for measuring the integrity of passivation overcoats on integrated circuits

Werner Kern and Robert B. Comizzoli

（NBS special publication, 400-31 . Semiconductor measurement technology）

U.S. G.P.O., 1977

Note

Includes bibliographical references

Details

• NCID: BB18756573
• LCCN: 76608229
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Washington
• Pages/Volumes: xiv, 105 p.
• Size: 26 cm
• Classification:
  • LCC : QC100
  • LCC : TK7874
  • DC : 602/.1 s
  • DC : 621.381/73
• Subject Headings:
  • LCSH : Integrated circuits -- Passivation
  • LCSH : Protective coatings -- Testing
  • LCSH : Microelectronics -- Quality control
• Parent Bibliography ID:
  • BA0011083X