Techniques for measuring the integrity of passivation overcoats on integrated circuits

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Techniques for measuring the integrity of passivation overcoats on integrated circuits

Werner Kern and Robert B. Comizzoli

(NBS special publication, 400-31 . Semiconductor measurement technology)

U.S. G.P.O., 1977

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Includes bibliographical references

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  • NBS special publication

    Planning Office, National Bureau of Standards, U.S. Dept. of Commerce , For sale by the Supt. of Docs., U.S. Govt. Print. Off

    426, Suppl. 1

    所蔵館1館

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