Notes on SEM examination of microelectronic devices

Author(s)

• Devaney, John R.
• Leedy, K. O.
• Keery, W. J.

Bibliographic Information

Notes on SEM examination of microelectronic devices

John R. Devaney, K.O. Leedy and W.J. Keery

（NBS special publication, 400-35 . Semiconductor measurement technology|）

U.S. G.P.O., 1977

Access to Electronic Resource 2 items

• Notes on SEM examination of microelectronic devices / John R. Devaney, K.O. Leedy, and W.J. Keery.

  1977

  HathiTrust

  

• Notes on SEM examination of microelectronic devices / John R. Devaney, K.O. Leedy, and W.J. Keery.

  no.400:35 1977

  HathiTrust

  

Note

Includes bibliographical references

Details

• NCID: BB18761063
• LCCN: 77608011
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Washington
• Pages/Volumes: iv, 48 p.
• Size: 26 cm
• Classification:
  • LCC : QC100
  • LCC : TK7874
  • DC : 602/.1 s
  • DC : 621.381/71/028
• Subject Headings:
  • LCSH : Miniature electronic equipment -- Testing
  • LCSH : Semiconductors -- Testing
  • LCSH : Scanning electron microscopy
• Parent Bibliography ID:
  • BA0011083X