Spreading resistance analysis for silicon layers with nonuniform resistivity

Author(s)

• Dickey, David H.
• Ehrstein, James R.

Bibliographic Information

Spreading resistance analysis for silicon layers with nonuniform resistivity

David H. Dickey and James R. Ehrstein

（NBS special publication, 400-48 . Semiconductor measurement technology）

U.S. G.P.O., 1979

Access to Electronic Resource 2 items

• Spreading resistance analysis for silicon layers with nonuniform resistivity / David H. Dickey and James R. Ehrstein.

  1979

  HathiTrust

  

• Spreading resistance analysis for silicon layers with nonuniform resistivity / David H. Dickey, Solecon Laboratories, and James R. Ehrstein, Electron Devices Division, Center for Electronics & Electrical Engineering, National Engineering Laboratory, National Bureau of Standards.

  1979

  HathiTrust

  

Details

• NCID: BB18855531
• LCCN: 79607012
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Washington
• Pages/Volumes: vi, 65 p.
• Size: 26 cm
• Classification:
  • LCC : QC100
  • LCC : TK7871.85
  • DC : 602/.1 s
  • DC : 621.3815/2/028
• Subject Headings:
  • LCSH : Semiconductors -- Testing
  • LCSH : Electric resistance, Spreading
  • LCSH : Silicon -- Electric properties
• Parent Bibliography ID:
  • BA0011083X