An automated photovoltaic system for the measurement of resistivity variations in high-resistivity circular silicon slices

著者

• Blackburn, David L.

書誌事項

An automated photovoltaic system for the measurement of resistivity variations in high-resistivity circular silicon slices

David L. Blackburn

（NBS special publication, 400-52 . Semiconductor measurement technology）

U.S. G.P.O., 1979

注記

Includes bibliographical references

詳細情報

• NII書誌ID(NCID): BB18861942
• LCCN: 79600178
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Washington
• ページ数/冊数: iv, 35 p.
• 大きさ: 26 cm
• 分類:
  • LCC : QC100
  • LCC : TK7871.85
• 件名:
  • LCSH : Semiconductors -- Testing -- Equipment and supplies
  • LCSH : Semiconductor wafers -- Testing
  • LCSH : Silicon -- Electric properties
  • LCSH : Semiconductor industry -- Automation
• 親書誌ID:
  • BA0011083X