An automated photovoltaic system for the measurement of resistivity variations in high-resistivity circular silicon slices

Author(s)

• Blackburn, David L.

Bibliographic Information

An automated photovoltaic system for the measurement of resistivity variations in high-resistivity circular silicon slices

David L. Blackburn

（NBS special publication, 400-52 . Semiconductor measurement technology）

U.S. G.P.O., 1979

Note

Includes bibliographical references

• NCID: BB18861942
• LCCN: 79600178
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Washington
• Pages/Volumes: iv, 35 p.
• Size: 26 cm
• Classification:
  • LCC : QC100
  • LCC : TK7871.85
• Subject Headings:
  • LCSH : Semiconductors -- Testing -- Equipment and supplies
  • LCSH : Semiconductor wafers -- Testing
  • LCSH : Silicon -- Electric properties
  • LCSH : Semiconductor industry -- Automation
• Parent Bibliography ID:
  • BA0011083X