3D process technology

Author(s)

• Garrou, Philip E.
• Koyanagi, Mitsumasa
• Ramm, Peter

Bibliographic Information

3D process technology

edited by Philip Garrou, Mitsumasa Koyanagi and Peter Ramm

（Handbook of 3D integration, v. 3）

Wiley-VCH, c2014

• hbk.

Note

Includes bibliographical references and index

• NCID: BB18909379
• ISBN:
  • 9783527334667
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Weinheim, Germany
• Pages/Volumes: xxii, 451 p.
• Size: 26 cm
• Classification:
  • DC23 : 621.3815
• Subject Headings:
  • LCSH : Integrated circuits
  • LCSH : Integrated circuits -- Design and construction
  • LCSH : Silicon
  • LCSH : Three-dimensional imaging
• Parent Bibliography ID:
  • BB18909233