Acoustic wave and electromechanical resonators : concept to key applications
Author(s)
Bibliographic Information
Acoustic wave and electromechanical resonators : concept to key applications
（Integrated microsystems series）
Artech House, c2010
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Note
Includes bibliographical references and index
Description and Table of Contents
Description
This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.
Table of Contents
- Preface
- Part I: Introduction to Thin-Film Bulk Acoustic Wave Resonators (FBAR), Micro and Nano Electro Mechanical System (M/NEMS) Resonators - MEMS and NEMS Resonator Technologies
- Acoustic Resonator Technologies
- Design and Modeling of Micro and Nano Resonators
- Part II: Fabrication Technologies and CMOS Integration - Fabrication Techniques
- Characterization Techniques
- Performance Optimization
- Integration of Resonator to CMOS Technologies
- Part III: Applications of FBAR, MEMS, NEMS Resonators - Sensor Applications
- Radio Frequency (RF) Applications
- Case Studies: Modeling, Design and Fabrication of FBAR and MEMS-Based Systems.
by "Nielsen BookData"