Introduction to micromechanisms and microactuators
著者
書誌事項
Introduction to micromechanisms and microactuators
（Mechanisms and machine science / series editor, Marco Ceccarelli, 28）
Springer, c2015
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
This book presents a basic introduction to micromechanisms and microactuators, particularly to their basic configurations and design. This book fills the persisting gap in the published literature on the mechanical manipulative aspects of micromechanisms. It also helps in offering specialized introductory courses on micromechanisms and microactuators not as part of MEMS sensing devices, but as mechanical manipulative systems. The level of the book is suitable for use in both undergraduate and introductory graduate programmes. The book presents an overview of miniaturization and scaling laws, basic design principles of micro-sized mechanisms and actuators, micro-fabrication processes, and some futuristic issues. The volume contains a large number of figures and illustrations for easy understanding by the readers. It will also be useful to researchers and professionals looking for an introduction to the topic.
目次
Introduction.- Miniaturization and Microsystems.- Scaling Laws: Science of Miniaturization.- Micromechanisms.- Design of Micromechanisms.- Dynamics of Micromechanisms.- Microactuators.- Microfabrication and Futuristic Issues.
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