Materials processing by cluster ion beams : history, technology, and applications

Author(s)

• 山田, 公 ヤマダ, イサオ

Bibliographic Information

Materials processing by cluster ion beams : history, technology, and applications

Isao Yamada

CRC Press, [2015], c2016

• hardcover : alk.

Note

Includes bibliographical references and index

Details

• NCID: BB19466080
• ISBN:
  • 9781498711753
• LCCN: 2015027379
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Boca Raton
• Pages/Volumes: xv, 244 p.
• Classification:
  • LCC : TA418.6
  • DC23 : 620.1/101530416
• Subject Headings:
  • LCSH : Ion bombardment
  • LCSH : Ion implantation
  • LCSH : Materials -- Effect of radiation on