Materials processing by cluster ion beams : history, technology, and applications
著者
書誌事項
Materials processing by cluster ion beams : history, technology, and applications
CRC Press, [2015], c2016
- hardcover : alk.
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing.
Written by the originator of the gas cluster ion beam (GCIB) concept, this book:
Offers an overview of ion beam technologies, from the discovery of monomer ions to the introduction of GCIBs
Explores the development of sources for producing cluster beams from solid materials
Describes the engineering characteristics of gas cluster ion beam equipment
Covers cluster ion-solid surface interaction kinetics as well as sputtering, implantation, and ion-assisted deposition
Details surface processing techniques for smoothing, shallow implantation, and preparation of high-quality thin films
Introduces representative examples of emerging GCIB industrial applications
Materials Processing by Cluster Ion Beams: History, Technology, and Applications provides a deeper understanding of the importance of cluster ion beams and their applications.
目次
Ion Beam Technology: Overview and History. History and Milestones of Cluster Beam Development. Development of Cluster Beam Sources for Solid Materials. Gas Cluster Ion Beam Equipment. Cluster Ion-Solid Surface Interaction Kinetics. Cluster Ion Beam Sputtering. Cluster Ion Implantation. Cluster Ion Beam-Assisted Deposition. Applications. Conclusions.
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