Reliability of MEMS : testing of materials and devices

Author(s)

• 土屋, 智由 ツチヤ, トシユキ
• 田畑, 修 タバタ, オサム

Bibliographic Information

Reliability of MEMS : testing of materials and devices

edited by Osamu Tabata and Toshiyuki Tsuchiya

（Advanced micro & nanosystems）

Wiley-VCH, c2013

Note

Includes bibliographical references and index

"First edition 2007"--t.p.verso

Details

• NCID: BB19673019
• ISBN:
  • 9783527335015
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Weinheim
• Pages/Volumes: xx, 303 p.
• Size: 25 cm
• Classification:
  • LCC : TK7875
  • DC22 : 621
• Subject Headings:
  • LCSH : Microelectromechanical systems -- Reliability
• Parent Bibliography ID:
  • BA70371204