Advanced control of piezoelectric micro-/nano-positioning systems

Author(s)

• Xu, Qingsong
• Tan, Kok Kiong

Bibliographic Information

Advanced control of piezoelectric micro-/nano-positioning systems

Qingsong Xu, Kok Kiong Tan

（Advances in industrial control）

Springer, c2016

• hbk.

Note

Includes bibliographical references

Details

• NCID: BB19910384
• ISBN:
  • 9783319216225
• Country Code: sz
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Cham
• Pages/Volumes: xx, 257 p.
• Size: 25 cm
• Classification:
  • DC23 : 621.3815
• Subject Headings:
  • LCSH : Piezoelectric devices
  • LCSH : Automatic control
  • LCSH : Expert systems (Computer science)
• Parent Bibliography ID:
  • BA17234269