{"@context":{"owl":"http://www.w3.org/2002/07/owl#","bibo":"http://purl.org/ontology/bibo/","foaf":"http://xmlns.com/foaf/0.1/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/"},"@id":"https://ci.nii.ac.jp/ncid/BB2075642X.json","@graph":[{"@id":"https://ci.nii.ac.jp/ncid/BB2075642X#entity","@type":"bibo:Book","foaf:isPrimaryTopicOf":{"@id":"https://ci.nii.ac.jp/ncid/BB2075642X.json"},"dc:title":[{"@value":"MEMS : fundamental technology and applications"}],"dc:creator":"edited by Vikas Choudhary, Krzysztof Iniewski","dc:publisher":[{"@value":"CRC Press"}],"dcterms:extent":"xxii, 456 p.","cinii:size":"26 cm","dc:language":"eng","dc:date":"2013","cinii:ncid":"BB2075642X","cinii:ownerCount":"1","foaf:maker":[{"@type":"foaf:Person","foaf:name":[{"@value":"Choudhary, Vikas"}]},{"@id":"https://ci.nii.ac.jp/author/DA15933627#entity","@type":"foaf:Person","foaf:name":[{"@value":"Iniewski, Krzysztof"}]}],"bibo:owner":[{"@id":"https://ci.nii.ac.jp/library/FA002418","@type":"foaf:Organization","foaf:name":"名古屋大学 附属図書館 医学部分館","rdfs:seeAlso":{"@id":"https://m-opac.nul.nagoya-u.ac.jp/iwjs0023opc/ufirdi.do?ufi_target=ctlsrh&ncid=BB2075642X&initFlg=_RESULT_SET_NOTBIB"}}],"bibo:lccn":["2013001258"],"rdfs:seeAlso":[{"@id":"https://lccn.loc.gov/2013001258"}],"prism:publicationDate":["c2013"],"cinii:note":["Includes bibliographical references and index"],"dc:subject":["LCC:TK7875","DC23:621.381"],"foaf:topic":[{"@id":"https://ci.nii.ac.jp/books/search?q=Microelectromechanical+systems","dc:title":"Microelectromechanical systems"},{"@id":"https://ci.nii.ac.jp/books/search?q=Microelectronic+packaging","dc:title":"Microelectronic packaging"},{"@id":"https://ci.nii.ac.jp/books/search?q=MEDICAL+%2F+Biotechnology+bisacsh","dc:title":"MEDICAL / Biotechnology bisacsh"},{"@id":"https://ci.nii.ac.jp/books/search?q=TECHNOLOGY+%26+ENGINEERING+%2F+Electronics+%2F+Circuits+%2F+General+bisacsh","dc:title":"TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh"},{"@id":"https://ci.nii.ac.jp/books/search?q=TECHNOLOGY+%26+ENGINEERING+%2F+Nanotechnology+%26+MEMS+bisacsh","dc:title":"TECHNOLOGY & ENGINEERING / Nanotechnology & MEMS bisacsh"}],"dcterms:isPartOf":[{"@id":"https://ci.nii.ac.jp/ncid/BA00859160#entity","dc:title":"Electronic devices, circuits, and systems / Michael M. Cirovic, James H. Harter","@type":"bibo:Book"}],"dcterms:hasPart":[{"@id":"urn:isbn:9781466515819"}]}]}