Handbook of optical metrology : principles and applications

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書誌事項

Handbook of optical metrology : principles and applications

edited by Toru Yoshizawa

CRC Press, c2015

2nd ed

  • : pbk

大学図書館所蔵 件 / 全3件

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注記

Includes bibliographical references and index

内容説明・目次

内容説明

Handbook of Optical Metrology: Principles and Applications begins by discussing key principles and techniques before exploring practical applications of optical metrology. Designed to provide beginners with an introduction to optical metrology without sacrificing academic rigor, this comprehensive text: Covers fundamentals of light sources, lenses, prisms, and mirrors, as well as optoelectronic sensors, optical devices, and optomechanical elements Addresses interferometry, holography, and speckle methods and applications Explains Moire metrology and the optical heterodyne measurement method Delves into the specifics of diffraction, scattering, polarization, and near-field optics Considers applications for measuring length and size, displacement, straightness and parallelism, flatness, and three-dimensional shapes This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters-nearly 100 pages-on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.

目次

Light Sources. Lenses, Prisms, and Mirrors. Optoelectronic Sensors. Optical Devices and Optomechanical Elements. Propagation of Light. Interferometry. Holography. Speckle Methods and Applications. Moire Metrology. Optical Heterodyne Measurement Method. Diffraction. Light Scattering. Polarization. Near-Field Optics. Length and Size. Displacement. Straightness and Alignment. Flatness. Surface Profilometry. Three-Dimensional Shape Measurement. Fringe Analysis. Photogrammetry. Optical Methods in Solid Mechanics. Optical Methods in Flow Measurement. Polarimetry. Birefringence Measurement. Ellipsometry. Optical Thin Film and Coatings. Film Surface and Thickness Profilometry. Optical Coherence Tomography for Industrial Applications. Interference Microscopy for Surface Structure Analysis. Noncontact Dimensional and Profile Metrology by Video Measurement. Optical Metrology in Manufacturing Technology. On-Machine Measurements.

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