Lecture notes on principles of plasma processing

Author(s)

• Chen, Francis F.
• Chang, Jane P.

Bibliographic Information

Lecture notes on principles of plasma processing

Francis F. Chen and Jane P. Chang

Springer Science+Business Media, c2003

• : pbk.

Note

Reprint. Originally published: Kluwer Academic, 2003

Details

• NCID: BB21550022
• ISBN:
  • 9780306474972
• LCCN: 2002040665
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York
• Pages/Volumes: ix, 208 p.
• Size: 28 cm
• Classification:
  • DC21 : 621.044
• Subject Headings:
  • LCSH : Plasma engineering
  • LCSH : Plasma chemistry
  • LCSH : Plasma dynamics