Resonant MEMS : fundamentals, implementation and application

Author(s)

• Brand, Oliver
• Dufour, Isabelle
• Heinrich, Stephen M.
• Josse, Fabien

Bibliographic Information

Resonant MEMS : fundamentals, implementation and application

edited by Oliver Brand ... [et al.]

（Advanced micro & nanosystems）

Wiley-VCH, c2015

Note

Includes bibliographical references and index

Other editors : Isabelle Dufour, Stephen M. Heinrich, and Fabien Josse

Details

• NCID: BB21819252
• ISBN:
  • 9783527335459
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Weinheim
• Pages/Volumes: xxv, 483 p.
• Size: 26 cm
• Classification:
  • DC23 : 621.381
• Subject Headings:
  • LCSH : Microelectromechanical systems
• Parent Bibliography ID:
  • BA70371204