Ion implantation in semiconductors

Author(s)

Bibliographic Information

Ion implantation in semiconductors

D. Stievenard, J.C. Bourgoin

（Diffusion and defect data : solid state data, Pt. B. solid state phenomena ; v. 1 & 2）

Sci-Tech Publications, [1988]

  • : [pbk]

Other Title

Solid state phenomena

Available at  / 2 libraries

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Note

"Focus -- Ion implantation in semiconductors"

"SSP"

Related Books： 1-1 of 1

Details

  • NCID
    BB22605414
  • Country Code
    lh
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Vaduz, Liechtenstein
  • Pages/Volumes
    v, 473 p.
  • Size
    25 cm
  • Parent Bibliography ID
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