{"@context":{"owl":"http://www.w3.org/2002/07/owl#","bibo":"http://purl.org/ontology/bibo/","foaf":"http://xmlns.com/foaf/0.1/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/"},"@id":"https://ci.nii.ac.jp/ncid/BB23540664.json","@graph":[{"@id":"https://ci.nii.ac.jp/ncid/BB23540664#entity","@type":"bibo:Book","foaf:isPrimaryTopicOf":{"@id":"https://ci.nii.ac.jp/ncid/BB23540664.json"},"dc:title":[{"@value":"Nanoscale silicon devices"}],"dc:creator":"edited by Shunri Oda, David K. Ferry","dc:publisher":[{"@value":"CRC Press"}],"dcterms:extent":"xii, 288 p.","cinii:size":"24 cm","dc:language":"eng","dc:date":"2016","cinii:ncid":"BB23540664","cinii:ownerCount":"5","foaf:maker":[{"@id":"https://ci.nii.ac.jp/author/DA04954997#entity","@type":"foaf:Person","foaf:name":[{"@value":"小田, 俊理 "},{"@value":"オダ, シュンリ","@language":"ja-hrkt"}]},{"@id":"https://ci.nii.ac.jp/author/DA02488474#entity","@type":"foaf:Person","foaf:name":[{"@value":"Ferry, David K."}]}],"bibo:owner":[{"@id":"https://ci.nii.ac.jp/library/FA011791","@type":"foaf:Organization","foaf:name":"東京大学 工学部・工学系研究科","rdfs:seeAlso":{"@id":"https://opac.dl.itc.u-tokyo.ac.jp/opac/opac_openurl/?ncid=BB23540664"}},{"@id":"https://ci.nii.ac.jp/library/FA000106","@type":"foaf:Organization","foaf:name":"東京科学大学 大岡山図書館","rdfs:seeAlso":{"@id":"https://topics.libra.titech.ac.jp/recordID/catalog.bib/BB23540664"}},{"@id":"https://ci.nii.ac.jp/library/FA003035","@type":"foaf:Organization","foaf:name":"神戸大学 附属図書館 自然科学系図書館","rdfs:seeAlso":{"@id":"https://op.lib.kobe-u.ac.jp/opac/opac_openurl/?rfe_dat=ncid/BB23540664"}},{"@id":"https://ci.nii.ac.jp/library/FA003964","@type":"foaf:Organization","foaf:name":"大阪公立大学 杉本図書館","rdfs:seeAlso":{"@id":"https://opac.ao.omu.ac.jp/webopac/ufirdi.do?ufi_target=ctlsrh&ncid=BB23540664"}},{"@id":"https://ci.nii.ac.jp/library/FA014927","@type":"foaf:Organization","foaf:name":"広島市立大学 附属図書館","rdfs:seeAlso":{"@id":"https://opac.lib.hiroshima-cu.ac.jp/opac/search?target=local&searchmode=complex&autoDetail=true&s_ncid=BB23540664"}}],"bibo:lccn":["2016448121"],"rdfs:seeAlso":[{"@id":"https://lccn.loc.gov/2016448121"}],"prism:publicationDate":["c2016"],"cinii:note":["Includes bibliographical references and index"],"dc:subject":["LCC:TK7875","DC23:621.3/8152"],"foaf:topic":[{"@id":"https://ci.nii.ac.jp/books/search?q=Nanoelectromechanical+systems","dc:title":"Nanoelectromechanical systems"},{"@id":"https://ci.nii.ac.jp/books/search?q=Nanotechnology","dc:title":"Nanotechnology"},{"@id":"https://ci.nii.ac.jp/books/search?q=Silicon+crystals+--+Electric+properties","dc:title":"Silicon crystals -- Electric properties"}],"dcterms:hasPart":[{"@id":"urn:isbn:9781482228670","dc:title":": hardback"}]}]}