Principles of lithography

著者

• Levinson, Harry J.

書誌事項

Principles of lithography

Harry J. Levinson

（SPIE Press monograph, PM198）

SPIE Press, c2010

3rd ed

注記

"SPIE Vol. No.: PM198"--Backcover

Includes bibliographical references and index

内容説明・目次

内容説明

The publication of Principles of Lithography, Third Edition just five years after the previous edition is evidence of the quickly changing and exciting nature of lithography as applied to the production of integrated circuits and other micro- and nanoscale devices. This text is intended to serve as an introduction to the science of microlithography, but also covers several subjects in depth, making it useful to the experienced lithographer as well. Topics directly related to manufacturing tools are addressed, including overlay, the stages of exposure, tools, and light sources. This updated edition reflects recent advances in technology, including the shift of immersion lithography from development into volume manufacturing, and the movement of EUV lithography from the lab to development pilot lines. New references and homework problems are included. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BB23592588
• ISBN:
  • 9780819483249
• LCCN: 2010026775
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: xiv, 504 p., [4] p. of plates
• 大きさ: 26 cm
• 分類:
  • LCC : TK7874
  • DC22 : 621.3815/31
• 件名:
  • LCSH : Integrated circuits -- Design and construction
  • LCSH : Microlithography
• 親書誌ID:
  • BA36743372