Principles of lithography

Author(s)

• Levinson, Harry J.

Bibliographic Information

Principles of lithography

Harry J. Levinson

（SPIE Press monograph, PM198）

SPIE Press, c2010

3rd ed

Note

"SPIE Vol. No.: PM198"--Backcover

Includes bibliographical references and index

Details

• NCID: BB23592588
• ISBN:
  • 9780819483249
• LCCN: 2010026775
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: xiv, 504 p., [4] p. of plates
• Size: 26 cm
• Classification:
  • LCC : TK7874
  • DC22 : 621.3815/31
• Subject Headings:
  • LCSH : Integrated circuits -- Design and construction
  • LCSH : Microlithography
• Parent Bibliography ID:
  • BA36743372