Micro-system technologies 98 : 6th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, December 1 - 3, 1998

Author(s)

• International Conference on Micro Electro, Opto, Mechanic Systems and Components
• Reichl, H. (Herbert)
• Obermeier, Ernst

Bibliographic Information

Micro-system technologies 98 : 6th International Conference on Micro Electro, Opto, Mechanical Systems and Components, Potsdam, December 1 - 3, 1998

Herbert Reichl, Ernst Obermeier, editors

VDE-Verl, 1998

• : hardcover

Note

Includes bibliographical references and author's index (p. 751-756)

• NCID: BB23901616
• ISBN:
  • 3800724219
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Berlin ; Offenbach
• Pages/Volumes: 756 p.
• Size: 25 cm
• Classification:
  • SG : 37;36
• Subject Headings:
  • SWD : Mikrosystemtechnik -- Kongress -- Potsdam <1998>