MOS devices for low-voltage and low-energy applications

著者

• 大村, 泰久 オオムラ, ヤスヒサ
• Mallik, Abhijit
• Matsuo, N. (Naoto)

書誌事項

MOS devices for low-voltage and low-energy applications

Yasuhisa Omura, Abhijit Mallik, Naoto Matsuo

Wiley, 2017

注記

"IEEE Press"

Includes bibliographical references and index

内容説明・目次

内容説明

Helps readers understand the physics behind MOS devices for low-voltage and low-energy applications Based on timely published and unpublished work written by expert authors Discusses various promising MOS devices applicable to low-energy environmental and biomedical uses Describes the physical effects (quantum, tunneling) of MOS devices Demonstrates the performance of devices, helping readers to choose right devices applicable to an industrial or consumer environment Addresses some Ge-based devices and other compound-material-based devices for high-frequency applications and future development of high performance devices. "Seemingly innocuous everyday devices such as smartphones, tablets and services such as on-line gaming or internet keyword searches consume vast amounts of energy. Even when in standby mode, all these devices consume energy. The upcoming 'Internet of Things' (IoT) is expected to deploy 60 billion electronic devices spread out in our homes, cars and cities. Britain is already consuming up to 16 per cent of all its power through internet use and this rate is doubling every four years. According to The UK's Daily Mail May (2015), if usage rates continue, all of Britain's power supply could be consumed by internet use in just 20 years. In 2013, U.S. data centers consumed an estimated 91 billion kilowatt-hours of electricity, corresponding to the power generated by seventeen 1000-megawatt nuclear power plants. Data center electricity consumption is projected to increase to roughly 140 billion kilowatt-hours annually by 2020, the equivalent annual output of 50 nuclear power plants." -Natural Resources Defense Council, USA, Feb. 2015 All these examples stress the urgent need for developing electronic devices that consume as little energy as possible. The book "MOS Devices for Low-Voltage and Low-Energy Applications" explores the different transistor options that can be utilized to achieve that goal. It describes in detail the physics and performance of transistors that can be operated at low voltage and consume little power, such as subthreshold operation in bulk transistors, fully depleted SOI devices, tunnel FETs, multigate and gate-all-around MOSFETs. Examples of low-energy circuits making use of these devices are given as well. "The book MOS Devices for Low-Voltage and Low-Energy Applications is a good reference for graduate students, researchers, semiconductor and electrical engineers who will design the electronic systems of tomorrow." -Dr. Jean-Pierre Colinge, Taiwan Semiconductor Manufacturing Company (TSMC) "The authors present a creative way to show how different MOS devices can be used for low-voltage and low-power applications. They start with Bulk MOSFET, following with SOI MOSFET, FinFET, gate-all-around MOSFET, Tunnel-FET and others. It is presented the physics behind the devices, models, simulations, experimental results and applications. This book is interesting for researchers, graduate and undergraduate students. The low-energy field is an important topic for integrated circuits in the future and none can stay out of this." -Prof. Joao A. Martino, University of Sao Paulo, Brazil

目次

Preface xv Acknowledgments xvi Part I INTRODUCTION TO LOW-VOLTAGE AND LOW-ENERGY DEVICES 1 1 Why Are Low-Voltage and Low-Energy Devices Desired? 3 References 4 2 History of Low-Voltage and Low-Power Devices 5 2.1 Scaling Scheme and Low-Voltage Requests 5 2.2 Silicon-on-Insulator Devices and Real History 8 References 10 3 Performance Prospects of Subthreshold Logic Circuits 12 3.1 Introduction 12 3.2 Subthreshold Logic and its Issues 12 3.3 Is Subthreshold Logic the Best Solution? 13 References 13 Part II SUMMARY OF PHYSICS OF MODERN SEMICONDUCTOR DEVICES 15 4 Overview 17 References 18 5 Bulk MOSFET 19 5.1 Theoretical Basis of Bulk MOSFET Operation 19 5.2 Subthreshold Characteristics: "OFF State" 19 5.2.1 Fundamental Theory 19 5.2.2 Influence of BTBT Current 23 5.2.3 Points to Be Remarked 24 5.3 Post-Threshold Characteristics: "ON State" 24 5.3.1 Fundamental Theory 24 5.3.2 Self-Heating Effects 26 5.3.3 Parasitic Bipolar Effects 27 5.4 Comprehensive Summary of Short-Channel Effects 27 References 28 6 SOI MOSFET 29 6.1 Partially Depleted Silicon-on-Insulator Metal Oxide Semiconductor Field-Effect Transistors 29 6.2 Fully Depleted (FD) SOI MOSFET 30 6.2.1 Subthreshold Characteristics 30 6.2.2 Post-Threshold Characteristics 36 6.2.3 Comprehensive Summary of Short-Channel Effects 41 6.3 Accumulation-Mode (AM) SOI MOSFET 41 6.3.1 Aspects of Device Structure 41 6.3.2 Subthreshold Characteristics 42 6.3.3 Drain Current Component (I) - Body Current (ID,body) 43 6.3.4 Drain Current Component (II) - Surface Accumulation Layer Current (ID,acc) 45 6.3.5 Optional Discussions on the Accumulation Mode SOI MOSFET 45 6.4 FinFET and Triple-Gate FET 46 6.4.1 Introduction 46 6.4.2 Device Structures and Simulations 46 6.4.3 Results and Discussion 47 6.4.4 Summary 49 6.5 Gate-all-Around MOSFET 50 References 51 7 Tunnel Field-Effect Transistors (TFETs) 53 7.1 Overview 53 7.2 Model of Double-Gate Lateral Tunnel FET and Device Performance Perspective 53 7.2.1 Introduction 53 7.2.2 Device Modeling 54 7.2.3 Numerical Calculation Results and Discussion 61 7.2.4 Summary 65 7.3 Model of Vertical Tunnel FET and Aspects of its Characteristics 65 7.3.1 Introduction 65 7.3.2 Device Structure and Model Concept 65 7.3.3 Comparing Model Results with TCAD Results 69 7.3.4 Consideration of the Impact of Tunnel Dimensionality on Drivability 72 7.3.5 Summary 75 7.4 Appendix Integration of Eqs. (7.14)-(7.16) 76 References 78 Part III POTENTIAL OF CONVENTIONAL BULK MOSFETs 81 8 Performance Evaluation of Analog Circuits with Deep Submicrometer MOSFETs in the Subthreshold Regime of Operation 83 8.1 Introduction 83 8.2 Subthreshold Operation and Device Simulation 84 8.3 Model Description 85 8.4 Results 86 8.5 Summary 90 References 90 9 Impact of Halo Doping on the Subthreshold Performance of Deep-Submicrometer CMOS Devices and Circuits for Ultralow Power Analog/Mixed-Signal Applications 91 9.1 Introduction 91 9.2 Device Structures and Simulation 92 9.3 Subthreshold Operation 93 9.4 Device Optimization for Subthreshold Analog Operation 95 9.5 Subthreshold Analog Circuit Performance 98 9.6 CMOS Amplifiers with Large Geometry Devices 105 9.7 Summary 106 References 107 10 Study of the Subthreshold Performance and the Effect of Channel Engineering on Deep Submicron Single-Stage CMOS Amplifiers 108 10.1 Introduction 108 10.2 Circuit Description 108 10.3 Device Structure and Simulation 110 10.4 Results and Discussion 110 10.5 PTAT as a Temperature Sensor 116 10.6 Summary 116 References 116 11 Subthreshold Performance of Dual-Material Gate CMOS Devices and Circuits for Ultralow Power Analog/Mixed-Signal Applications 117 11.1 Introduction 117 11.2 Device Structure and Simulation 118 11.3 Results and Discussion 120 11.4 Summary 126 References 127 12 Performance Prospect of Low-Power Bulk MOSFETs 128 Reference 129 Part IV POTENTIAL OF FULLY-DEPLETED SOI MOSFETs 131 13 Demand for High-Performance SOI Devices 133 14 Demonstration of 100 nm Gate SOI CMOS with a Thin Buried Oxide Layer and its Impact on Device Technology 134 14.1 Introduction 134 14.2 Device Design Concept for 100 nm Gate SOI CMOS 134 14.3 Device Fabrication 136 14.4 Performance of 100-nm- and 85-nm Gate Devices 137 14.4.1 Threshold and Subthreshold Characteristics 137 14.4.2 Drain Current (ID)-Drain Voltage (VD) and ID-Gate Voltage (VG) Characteristics of 100-nm-Gate MOSFET/SIMOX 138 14.4.3 ID-VD and ID-VG Characteristics of 85-nm-Gate MOSFET/SIMOX 142 14.4.4 Switching Performance 142 14.5 Discussion 142 14.5.1 Threshold Voltage Balance in Ultrathin CMOS/SOI Devices 142 14.6 Summary 144 References 145 15 Discussion on Design Feasibility and Prospect of High-Performance Sub-50 nm Channel Single-Gate SOI MOSFET Based on the ITRS Roadmap 147 15.1 Introduction 147 15.2 Device Structure and Simulations 148 15.3 Proposed Model for Minimum Channel Length 149 15.3.1 Minimum Channel Length Model Constructed using Extract A 149 15.3.2 Minimum Channel Length Model Constructed using Extract B 150 15.4 Performance Prospects of Scaled SOI MOSFETs 152 15.4.1 Dynamic Operation Characteristics of Scaled SG SOI MOSFETs 152 15.4.2 Tradeoff and Optimization of Standby Power Consumption and Dynamic Operation 157 15.5 Summary 162 References 162 16 Performance Prospects of Fully Depleted SOI MOSFET-Based Diodes Applied to Schenkel Circuits for RF-ID Chips 164 16.1 Introduction 164 16.2 Remaining Issues with Conventional Schenkel Circuits and an Advanced Proposal 165 16.3 Simulation-Based Consideration of RF Performance of SOI-QD 172 16.4 Summary 176 16.5 Appendix: A Simulation Model for Minority Carrier Lifetime 177 16.6 Appendix: Design Guideline for SOI-QDs 177 References 178 17 The Potential and the Drawbacks of Underlap Single-Gate Ultrathin SOI MOSFET 180 17.1 Introduction 180 17.2 Simulations 181 17.3 Results and Discussion 183 17.3.1 DC Characteristics and Switching Performance: Device A 183 17.3.2 RF Analog Characteristics: Device A 184 17.3.3 Impact of High- Gate Dielectric on Performance of USU SOI MOSFET Devices: Devices B and C 185 17.3.4 Impact of Simulation Model on Simulation Results 189 17.4 Summary 192 References 192 18 Practical Source/Drain Diffusion and Body Doping Layouts for High-Performance and Low-Energy Triple-Gate SOI MOSFETs 194 18.1 Introduction 194 18.2 Device Structures and Simulation Model 195 18.3 Results and Discussion 196 18.3.1 Impact of S/D-Underlying Layer on ION, IOFF, and Subthreshold Swing 196 18.3.2 Tradeoff of Short-Channel Effects and Drivability 196 18.4 Summary 201 References 201 19 Gate Field Engineering and Source/Drain Diffusion Engineering for High-Performance Si Wire Gate-All-Around MOSFET and Low-Power Strategy in a Sub-30 nm-Channel Regime 203 19.1 Introduction 203 19.2 Device Structures Assumed and Physical Parameters 204 19.3 Simulation Results and Discussion 206 19.3.1 Performance of Sub-30 nm-Channel Devices and Aspects of Device Characteristics 206 19.3.2 Impact of Cross-Section of Si Wire on Short-Channel Effects and Drivability 212 19.3.3 Minimizing Standby Power Consumption of GAA SOI MOSFET 216 19.3.4 Prospective Switching Speed Performance of GAA SOI MOSFET 217 19.3.5 Parasitic Resistance Issues of GAA Wire MOSFETs 218 19.3.6 Proposal for Possible GAA Wire MOSFET Structure 220 19.4 Summary 221 19.5 Appendix: Brief Description of Physical Models in Simulations 221 References 225 20 Impact of Local High- Insulator on Drivability and Standby Power of Gate-All-Around SOI MOSFET 228 20.1 Introduction 228 20.2 Device Structure and Simulations 229 20.3 Results and Discussion 230 20.3.1 Device Characteristics of GAA Devices with Graded-Profile Junctions 230 20.3.2 Device Characteristics of GAA Devices with Abrupt Junctions 235 20.3.3 Behaviors of Drivability and Off-Current 237 20.3.4 Dynamic Performance of Devices with Graded-Profile Junctions 239 20.4 Summary 239 References 240 Part V POTENTIAL OF PARTIALLY DEPLETED SOI MOSFETs 241 21 Proposal for Cross-Current Tetrode (XCT) SOI MOSFETs: A 60 dB Single-Stage CMOS Amplifier Using High-Gain Cross-Current Tetrode MOSFET/SIMOX 243 21.1 Introduction 243 21.2 Device Fabrication 244 21.3 Device Characteristics 245 21.4 Performance of CMOS Amplifier 247 21.5 Summary 249 References 249 22 Device Model of the XCT-SOI MOSFET and Scaling Scheme 250 22.1 Introduction 250 22.2 Device Structure and Assumptions for Modeling 251 22.2.1 Device Structure and Features of XCT Device 251 22.2.2 Basic Assumptions for Device Modeling 253 22.2.3 Derivation of Model Equations 254 22.3 Results and Discussion 258 22.3.1 Measured Characteristics of XCT Devices 258 22.4 Design Guidelines 261 22.4.1 Drivability Control 261 22.4.2 Scaling Issues 262 22.4.3 Potentiality of Low-Energy Operation of XCT CMOS Devices 265 22.5 Summary 267 22.6 Appendix: Calculation of MOSFET Channel Current 267 22.7 Appendix: Basic Condition for Drivability Control 271 References 271 23 Low-Power Multivoltage Reference Circuit Using XCT-SOI MOSFET 274 23.1 Introduction 274 23.2 Device Structure and Assumptions for Simulations 274 23.2.1 Device Structure and Features 274 23.2.2 Assumptions for Simulations 277 23.3 Proposal for Voltage Reference Circuits and Simulation Results 278 23.3.1 Two-Reference Voltage Circuit 278 23.3.2 Three-Reference Voltage Circuit 283 23.4 Summary 283 References 284 24 Low-Energy Operation Mechanisms for XCT-SOI CMOS Devices: Prospects for a Sub-20 nm Regime 285 24.1 Introduction 285 24.2 Device Structure and Assumptions for Modeling 286 24.3 Circuit Simulation Results of SOI CMOS and XCT-SOI CMOS 288 24.4 Further Scaling Potential of XCT-SOI MOSFET 291 24.5 Performance Expected from the Scaled XCT-SOI MOSFET 292 24.6 Summary 296 References 296 Part VI QUANTUM EFFECTS AND APPLICATIONS - 1 297 25 Overview 299 References 299 26 Si Resonant Tunneling MOS Transistor 301 26.1 Introduction 301 26.2 Configuration of SRTMOST 302 26.2.1 Structure and Electrostatic Potential 302 26.2.2 Operation Principle and Subthreshold Characteristics 304 26.3 Device Performance of SRTMOST 307 26.3.1 Transistor Characteristics of SRTMOST 307 26.3.2 Logic Circuit Using SRTMOST 310 26.4 Summary 312 References 312 27 Tunneling Dielectric Thin-Film Transistor 314 27.1 Introduction 314 27.2 Fundamental Device Structure 315 27.3 Experiment 315 27.3.1 Experimental Method 315 27.3.2 Calculation Method 317 27.4 Results and Discussion 320 27.4.1 Evaluation of SiNx Film 320 27.4.2 Characteristics of the TDTFT 320 27.4.3 TFT Performance at Low Temperatures 324 27.4.4 TFT Performance at High Temperatures 324 27.4.5 Suppression of the Hump Effect by the TDTFT 330 27.5 Summary 336 References 336 28 Proposal for a Tunnel-Barrier Junction (TBJ) MOSFET 339 28.1 Introduction 339 28.2 Device Structure and Model 339 28.3 Calculation Results 340 28.4 Summary 343 References 343 29 Performance Prediction of SOI Tunneling-Barrier-Junction MOSFET 344 29.1 Introduction 344 29.2 Simulation Model 345 29.3 Simulation Results and Discussion 349 29.3.1 Fundamental Properties of TBJ MOSFET 349 29.3.2 Optimization of Device Parameters and Materials 349 29.4 Summary 357 References 357 30 Physics-Based Model for TBJ-MOSFETs and High-Frequency Performance Prospects 358 30.1 Introduction 358 30.2 Device Structure and Device Model for Simulations 359 30.3 Simulation Results and Discussion 360 30.3.1 Current Drivability 361 30.3.2 Threshold Voltage Issue 362 30.3.3 Subthreshold Characteristics 363 30.3.4 Radio-Frequency Characteristics 363 30.4 Summary 365 References 365 31 Low-Power High-Temperature-Operation-Tolerant (HTOT) SOI MOSFET 367 31.1 Introduction 367 31.2 Device Structure and Simulations 368 31.3 Results and Discussion 371 31.3.1 Room-Temperature Characteristics 371 31.3.2 High-Temperature Characteristics 373 31.4 Summary 377 References 379 Part VII QUANTUM EFFECTS AND APPLICATIONS - 2 381 32 Overview of Tunnel Field-Effect Transistor 383 References 385 33 Impact of a Spacer Dielectric and a Gate Overlap/Underlap on the Device Performance of a Tunnel Field-Effect Transistor 386 33.1 Introduction 386 33.2 Device Structure and Simulation 387 33.3 Results and Discussion 387 33.3.1 Effects of Variation in the Spacer Dielectric Constant 387 33.3.2 Effects of Variation in the Spacer Width 391 33.3.3 Effects of Variation in the Source Doping Concentration 392 33.3.4 Effects of a Gate-Source Overlap 394 33.3.5 Effects of a Gate-Channel Underlap 394 33.4 Summary 397 References 397 34 The Impact of a Fringing Field on the Device Performance of a P-Channel Tunnel Field-Effect Transistor with a High- Gate Dielectric 399 34.1 Introduction 399 34.2 Device Structure and Simulation 399 34.3 Results and Discussion 400 34.3.1 Effects of Variation in the Gate Dielectric Constant 400 34.3.2 Effects of Variation in the Spacer Dielectric Constant 408 34.4 Summary 410 References 410 35 Impact of a Spacer-Drain Overlap on the Characteristics of a Silicon Tunnel Field-Effect Transistor Based on Vertical Tunneling 412 35.1 Introduction 412 35.2 Device Structure and Process Steps 413 35.3 Simulation Setup 414 35.4 Results and Discussion 416 35.4.1 Impact of Variation in the Spacer-Drain Overlap 416 35.4.2 Influence of Drain on the Device Characteristics 424 35.4.3 Impact of Scaling 426 35.5 Summary 429 References 430 36 Gate-on-Germanium Source Tunnel Field-Effect Transistor Enabling Sub-0.5-V Operation 431 36.1 Introduction 431 36.2 Proposed Device Structure 431 36.3 Simulation Setup 432 36.4 Results and Discussion 434 36.4.1 Device Characteristics 434 36.4.2 Effects of Different Structural Parameters 435 36.4.3 Optimization of Different Structural Parameters 436 36.5 Summary 445 References 445 Part VIII PROSPECTS OF LOW-ENERGY DEVICE TECHNOLOLGY AND APPLICATIONS 447 37 Performance Comparison of Modern Devices 449 References 450 38 Emerging Device Technology and the Future of MOSFET 452 38.1 Studies to Realize High-Performance MOSFETs based on Unconventional Materials 452 38.2 Challenging Studies to Realize High-Performance MOSFETs based on the Nonconventional Doctrine 453 References 454 39 How Devices Are and Should Be Applied to Circuits 456 39.1 Past Approach 456 39.2 Latest Studies 456 References 457 40 Prospects for Low-Energy Device Technology and Applications 458 References 459 Bibliography 460 Index 463

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詳細情報

• NII書誌ID(NCID): BB24008642
• ISBN:
  • 9781119107354
• LCCN: 2016026240
• 出版国コード: si
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Singapore
• ページ数/冊数: xvii, 465 p.
• 大きさ: 25 cm
• 分類:
  • LCC : TK7871.99.M44
  • DC23 : 621.3815/284
• 件名:
  • LCSH : Metal oxide semiconductors
  • LCSH : Metal oxide semiconductor field-effect transistors
  • LCSH : Low voltage integrated circuits
  • LCSH : Low voltage systems -- Industrial applications