Silicon wet bulk micromachining for MEMS

Author(s)

• Prem Pal
• 佐藤, 一雄 サトウ, カズオ

Bibliographic Information

Silicon wet bulk micromachining for MEMS

Prem Pal, Kazuo Sato

Pan Stanford Publishing, c2017

• : hardcover

Note

Includes bibliographical references and index

Details

• NCID: BB2427166X
• ISBN:
  • 9789814613729
• Country Code: si
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Singapore
• Pages/Volumes: xii, 412 p.
• Size: 24 cm
• Classification:
  • DC23 : 621.381
• Subject Headings:
  • LCSH : Microelectromechanical systems
  • LCSH : Microelectromechanical systems -- Materials
  • LCSH : Silicon -- Electric properties