Electrical characterization of silicon-on-insulator materials and devices

書誌事項

Electrical characterization of silicon-on-insulator materials and devices

by Sorin Cristoloveanu and Sheng S. Li

(The Kluwer international series in engineering and computer science, . Electronic materials : science and technology)

Springer Science+Business Media, c1995

  • : softcover

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注記

"Originally published by Kluwer Academic Publishers in 1995", " Softcover reprint of the hardcover 1st edition 1995"--T.p. verso

"KAP"--Spine

Includes bibliographical references and index

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