Hand book of deposition and sputtering : U. S. & [British] technical reports

Author(s)

Bibliographic Information

Hand book of deposition and sputtering : U. S. & [British] technical reports

（海外研究開発レポート, data no. 1185-(A)）

日本技術調査, [19--]

  • [set A]

Other Title

Handbook of deposition and sputtering

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Note

Photocopy.

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Details

  • NCID
    BB24716234
  • Country Code
    ja
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    [東京]
  • Pages/Volumes
    1 v. (various pagings)
  • Size
    30 cm
  • Parent Bibliography ID
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