Fundamental principles of engineering nanometrology
著者
書誌事項
Fundamental principles of engineering nanometrology
（Micro & nano technologies）
William Andrew / Elsevier, 2014
2nd ed
- : hbk
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内容説明・目次
内容説明
Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. Richard Leach introduces these techniques to a broad audience of engineers and scientists involved in nanotechnology and manufacturing applications and research. He also provides a routemap and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale. Starting from the fundamentals of precision measurement, the author progresses into different measurement and characterization techniques.
The focus on nanometrology in engineering contexts makes this book an essential guide for the emerging nanomanufacturing / nanofabrication sector, where measurement and standardization requirements are paramount both in product specification and quality assurance. This book provides engineers and scientists with the methods and understanding needed to design and produce high-performance, long-lived products while ensuring that compliance and public health requirements are met.
Updated to cover new and emerging technologies, and recent developments in standards and regulatory frameworks, this second edition includes many new sections, e.g. new technologies in scanning probe and e-beam microscopy, recent developments in interferometry and advances in co-ordinate metrology.
目次
1. Introduction to metrology for micro- and nanotechnology2. Some basics of measurement3. Precision measurement instrumentation - some design principles4. Length traceability using interferometry5. Displacement measurement6. Surface topography measurement instrumentation7. Scanning probe and particle beam microscopy8. Surface topography characterization9. Co-ordinate metrology10. Mass and force measurement
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