Measurement technology for micro-nanometer devices

著者

    • Zhang, Wendong
    • Chou, Xiujian
    • Shi, Tielin
    • Ma, Zongmin
    • Bao, Haifei
    • Chen, Jing
    • Chen, Liguo
    • Li, Dachao
    • Xue, Chenyang

書誌事項

Measurement technology for micro-nanometer devices

Wendong Zhang ... [et al.]

John Wiley & Sons, 2017

  • : cloth

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注記

Other authors: Xiujian Chou, Tielin Shi, Zongmin Ma, Haifei Bao, Jing Chen, Liguo Chen, Dachao Li, Chenyang Xue

"Published by John Wiley & Sons ... under exclusive license granted by National Defense Industry Press ..."--T.p. verso

Includes bibliographical references and index

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