Microprocesses and Nanotechnology '98 : proceedings of the 1998 International Microprocesses and Nanotechnology Conference, July 13-16, 1998, Kyungju, Korea
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Microprocesses and Nanotechnology '98 : proceedings of the 1998 International Microprocesses and Nanotechnology Conference, July 13-16, 1998, Kyungju, Korea
[s.n.], 1998.9
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"Reprinted from Jpn. J. Appl. Phys. Vol. 37(1998)Part 1, No.12B"
Includes bibliographical references and author index