Smart sensors and MEMS : intelligent sensing devices and microsystems for industrial applications
Author(s)
Bibliographic Information
Smart sensors and MEMS : intelligent sensing devices and microsystems for industrial applications
（Woodhead Publishing series in electronic and optical materials）
Woodhead Pub., c2018
2nd ed
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Note
Includes bibliographical references and index
Description and Table of Contents
Description
Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS).
The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information.
Table of Contents
1. What makes sensor devices and microsystems 'intelligent' or 'smart'? 2. Interfacing sensors to microcontrollers: a direct approach3. Temperature Sensors4. Capacitive sensors for displacement measurement in the sub-nanometer range 5. Integrated inductive displacement sensors for harsh industrial environments6. Magnetic Sensors7. Advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and the extreme ultraviolet (EUV) spectral range 8. Integrated polarization analyzing CMOS image sensors for detection and signal processing9. Advanced interfaces for resistive sensors10. Reconfigurable ultrasonic smart sensor platform for nondestructive evaluation and imaging applications11. Advanced optical incremental sensors: encoders and interferometers12. Microfabrication technologies used for creating smart devices for industrial applications13. Microactuators: design and technology14. Microreaction Chambers15. Dynamic behavior of smart MEMS in industrial applications16. MEMS integrating motion and displacement sensors 17. MEMS print heads for industrial printing 18. Photovoltaic and fuel cells in power MEMS for smart energy management19. Radio frequency (RF)-MEMS for smart communication microsystems20. Smart acoustic sensor array (SASA) system for real-time sound processing applications
by "Nielsen BookData"