Gallium oxide : technology, devices and applications
著者
書誌事項
Gallium oxide : technology, devices and applications
（Metal oxides series）
Elsevier, c2019
- : pbk
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注記
Includes bibliographical references (p. 462-464) and index
内容説明・目次
内容説明
Gallium Oxide: Technology, Devices and Applications discusses the wide bandgap semiconductor and its promising applications in power electronics, solar blind UV detectors, and in extreme environment electronics. It also covers the fundamental science of gallium oxide, providing an in-depth look at the most relevant properties of this materials system. High quality bulk Ga2O3 is now commercially available from several sources and n-type epi structures are also coming onto the market. As researchers are focused on creating new complex structures, the book addresses the latest processing and synthesis methods.
Chapters are designed to give readers a complete picture of the Ga2O3 field and the area of devices based on Ga2O3, from their theoretical simulation, to fabrication and application.
目次
1. Introduction and Overview
Part 1: Technology of Ga2O3 2. Bulk Growth of Ga2O3 by Edge-Fed Ribbon method 3. Progress in MOCVD growth of Ga2O3 4. CVD of different Ga2O3polymorphs and their applications 5. Pulsed laser deposition of aluminum gallium oxides for deep-UV detector applications 6. Dry Etching of Ga2O3 7. Ga2O3 -based nanostructures 8. Doping of Ga2O3
Part 2: Properties 9. Structural, electrophysical and optical properties of Ga2O3 10. First-principles modeling of sesquioxide semiconductors 11. Schottky Contacts to Ga2O3 12. Ohmic contacts to Ga2O3 13. Surface Properties of Ga2O3 14. Deep Traps in Ga2O3 15. Radiation Damage in Ga2O3
Part 3: Applications 16. Novel Solar-Blind Photodetectors and FETs Using Ga2O3 Exfoliated Flakes 17. FINFETs and Power MOSFETs 18. Power Ga2O3 Rectifiers 19. UV detectors 20. Ga2O3-based gas sensors 21. Photocatalysis (photocatalytic conversion CO2, etc.) 22. Transparent conductive oxides (amorphous Ga2O3 films)
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