Handbook of silicon wafer cleaning technology

Author(s)

• Reinhardt, Karen A.
• Kern, Werner

Bibliographic Information

Handbook of silicon wafer cleaning technology

edited by Karen A. Reinhardt, Werner Kern

William Andrew, Applied Science Publishers, c2018

3rd ed

• : pbk

Note

William Andrew is an imprint of Elsevier

Includes bibliographical references and index

Details

• NCID: BB27383717
• ISBN:
  • 9780323510844
• Country Code: uk
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Oxford
• Pages/Volumes: xviii, 773 p.
• Size: 23 cm
• Classification:
  • DC23 : 621.38152
• Subject Headings:
  • LCSH : Silicon-on-insulator technology