An industrial CMOS process family for integrated silicon sensors : a thesis submitted to the Swiss Federal Institute of Technology Zurich for the degree of doctor of natural sciences

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An industrial CMOS process family for integrated silicon sensors : a thesis submitted to the Swiss Federal Institute of Technology Zurich for the degree of doctor of natural sciences

presented by Thomas Müller

(Diss. ETH, No.13463)

Hartung-Gorre, 2000

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