Micromachined resonators for ultrasound based proximity sensing : a thesis submitted to the Swiss Federal Institute of Technology Zurich for the degree of Doctor of Natural Sciences
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Micromachined resonators for ultrasound based proximity sensing : a thesis submitted to the Swiss Federal Institute of Technology Zurich for the degree of Doctor of Natural Sciences
（Diss. ETH, Mo. 10896）
Swiss Federal Institute of Technology Zurich, 1994
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