Thermal properties of CMOS thin films : a thesis submitted to the Swiss Federal Institute of Technology Zurich for the degree of Doctor of Natural Sciences

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Thermal properties of CMOS thin films : a thesis submitted to the Swiss Federal Institute of Technology Zurich for the degree of Doctor of Natural Sciences

presented by Martin von Arx

(Diss. ETH, No. 12743)

Hartung-Gorre, 1998

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  • Diss. ETH

    Eidgenössische Technische Hochschule

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