Advanced Micro-Device Engineering V : selected, peer reviewed papers from the 5th International Conference on Advanced Micro-Device Engineering 2013 (AMDE 2013), December 19, 2013, Kiryu, Japan
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Advanced Micro-Device Engineering V : selected, peer reviewed papers from the 5th International Conference on Advanced Micro-Device Engineering 2013 (AMDE 2013), December 19, 2013, Kiryu, Japan
(Key engineering materials, v. 643)
Trans Tech Publications, c2015
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Includes bibliographical references and indexes