Lock-in thermography : basics and use for evaluating electronic devices and materials
著者
書誌事項
Lock-in thermography : basics and use for evaluating electronic devices and materials
（Advanced microelectronics, 10）
Springer Nature Switzerland, c2018
3rd ed
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注記
Includes bibliographical references (p. 303-317) and index
内容説明・目次
内容説明
This is the first book on lock-in thermography, an analytical method applied to the diagnosis of microelectronic devices. This useful introduction and guide reviews various experimental approaches to lock-in thermography, with special emphasis on the lock-in IR thermography developed by the authors themselves.
目次
1. Introduction
2. Physical and Technical Basics
2.1 IR Thermography Basics
2.2 The Lock-in Principle and its Digital Realization
2.3 Lock-in Thermography
2.4 Timing Strategies
2.5 Influence of Non-Harmonic Heating
2.6 Noise Analysis
2.7. Calibration
2.8 Heat Dissipation and Transport Mechanisms in Solar Cells
2.9 Carrier Density Imaging
3. Experimental Technique
3.1 Different (Lock-in) Thermography Realizations
3.2 Commercial Lock-in Thermography Systems
3.3 Illumination Systems
3.4 Solid Immersion Lenses
3.5. Realization of CDI/ILM Systems
3.5.1. Absorption Mode
3.5.2. Emission Mode
3.5.3. Lifetime Calibration
4. Theory
4.1 Influence of the Heat Conduction to the Surrounding
4.2 Temperature Drift Compensation
4.3 Thermal Waves of Point Sources
4.4 Thermal Waves of Extended Sources
4.5 The Quantitative Interpretation of Lock-in Thermograms
4.5.1 The Image Integration / Proportionality Method
4.5.2 Deconvolution of Lock-in Thermograms
5. Measurement Strategies
5.1 Which Signal Should be Displayed?
5.2 Influence of the Lock-in Frequency
5.3 Influence of the IR Emissivity
5.4 Influence of the Peltier Effect
6. Typical Applications
6.1 Integrated Circuits
6.1.1 3D Analysis
6.1.2 IC-Tester Controlled LIT
6.2 Solar Cells
6.2.1 Dark Lock-in Thermography (DLIT)
6.2.1.1 Shunt Imaging
6.2.1.2 High-current DLIT
6.2.1.3 Series Resistance Imaging (RESI)
6.2.1.4 Ideality Factor and Saturation Current Mapping
6.2.1.5 Local I-V curves measured Thermally (LIVT)
6.2.1.6 Reverse-bias DLIT
6.2.1.7 Temperature Coefficient and Slope Imaging
6.2.1.8 DLIT-based Jsc Imaging
6.2.1.9 Local I-V Evaluation
6.2.1.10 LIT and Luminescence Imaging: Comprehensive Loss Analysis
6.2.2 Illuminated Lock-in Thermography (ILIT)
6.2.2.1 Voc-ILIT
6.2.2.2 Jsc-ILIT
6.2.2.3 Rs-ILIT
6.2.2.4 Avalanche Multiplication Factor Imaging (MF-ILIT)
6.2.2.5 ILIT-Based Efficiency Imaging
6.2.2.6 ILIT-Based Jsc Imaging
6.2.2.7 Suns ILIT
6.2.3 Summary of Solar Cell Applications
6.3 Failure Analysis of Solar Modules
6.3.1 Differential ILIT Techniques
6.3.2 Solar Cell Analysis in Modules (SCAM)
6.4 Spin Caloritronics
6.5 CDI/ILM on Solar Materials
6.5.1 Analysis of Material Evaluation During Processing
6.5.1 Temperature-Dependent Measurements
6.5.3 Trap Density Images from CDI/ILM
7. Summary and Outlook
References
Appendix: Thermal and IR Properties of Selected Materials
List of Symbols
Abbreviations
Index
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