Means and methods for measurement and monitoring : supplement book to Advanced Micro-Device Engineering VIII : selected, peer reviewed papers from the 8th International Conference on Advanced Micro Device Engineering (AMDE 2016), December 9, 2016, Kiryu, Japan

著者

• International Conference on Advanced Micro Device Engineering
• 花泉, 修 ハナイズミ, オサム

書誌事項

Means and methods for measurement and monitoring : supplement book to Advanced Micro-Device Engineering VIII : selected, peer reviewed papers from the 8th International Conference on Advanced Micro Device Engineering (AMDE 2016), December 9, 2016, Kiryu, Japan

edited by Osamu Hanaizumi

（Applied mechanics and materials, v. 888）

Trans Tech Publications, c2019

• : pbk

注記

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BB28078989
• ISBN:
  • 9783035715538
• 出版国コード: sz
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Zurich
• ページ数/冊数: viii, 95 p.
• 大きさ: 25 cm
• 親書誌ID:
  • BA88918107