Chemical vapour deposition (CVD) : advances, technology and applications

著者

    • Choy, Kwang Leong

書誌事項

Chemical vapour deposition (CVD) : advances, technology and applications

edited by Kwang Leong Choy

(Series in materials science and engineering / B. Cantor, M. J. Goringe)

CRC Press, c2019

  • : hardback

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注記

Includes bibliographical references and index

内容説明・目次

内容説明

This book offers a timely and complete overview on chemical vapour deposition (CVD) and its variants for the processing of nanoparticles, nanowires, nanotubes, nanocomposite coatings, thin and thick films, and composites. Chapters discuss key aspects, from processing, material structure and properties to practical use, cost considerations, versatility, and sustainability. The author presents a comprehensive overview of CVD and its potential in producing high performance, cost-effective nanomaterials and thin and thick films. Features Provides an up-to-date introduction to CVD technology for the fabrication of nanomaterials, nanostructured films, and composite coatings Discusses processing, structure, functionalization, properties, and use in clean energy, engineering, and biomedical grand challenges Covers thin and thick films and composites Compares CVD with other processing techniques in terms of structure/properties, cost, versatility, and sustainability Kwang-Leong Choy is the Director of the UCL Centre for Materials Discovery and Professor of Materials Discovery in the Institute for Materials Discovery at the University College London. She earned her D.Phil. from the University of Oxford, and is the recipient of numerous honors including the Hetherington Prize, Oxford Metallurgical Society Award, and Grunfeld Medal and Prize from the Institute of Materials (UK). She is an elected fellow of the Institute of Materials, Minerals and Mining, and the Royal Society of Chemistry.

目次

  • 1: Introduction
  • 2: Chemical vapour deposition of ultrafine particles
  • 3: CVD of nanowires and nanotubes, mass production, and industrialization
  • 4: CVD of flat monolayer of 2D atomics honeycomb structure and their applications
  • 5: CVD of superlattice films and their applications
  • 6: CVD coatings
  • 7: CVD of nanocomposite coatings
  • 8: Chemical vapour infiltration of composites and their applications

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