Chemical vapour deposition (CVD) : advances, technology and applications

Author(s)

• Choy, Kwang Leong

Bibliographic Information

Chemical vapour deposition (CVD) : advances, technology and applications

edited by Kwang Leong Choy

（Series in materials science and engineering / B. Cantor, M. J. Goringe）

CRC Press, c2019

• : hardback

Note

Includes bibliographical references and index

Details

• NCID: BB2838808X
• ISBN:
  • 9781466597761
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Boca Raton
• Pages/Volumes: xvii, 398 p.
• Size: 26 cm
• Classification:
  • DC23 : 620.115
• Subject Headings:
  • LCSH : Chemical vapor deposition
  • LCSH : Nanostructured materials
• Parent Bibliography ID:
  • BA54744457