Catalytic chemical vapor deposition : technology and applications of cat-CVD

Author(s)

• Matsumura, Hideki
• 梅本, 宏信 ウメモト, ヒロノブ
• Gleason, Karen K.
• Schropp, Ruud E. I.

Bibliographic Information

Catalytic chemical vapor deposition : technology and applications of cat-CVD

Hideki Matsumura, Hironobu Umemoto, Karen K. Gleason, Ruud E. I. Schropp

Wiley-VCH, c2019

Note

Includes bibliographical references and index

Details

• NCID: BB28569346
• ISBN:
  • 9783527345236
• LCCN: 2023544237
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Weinheim
• Pages/Volumes: xvi, 421 p.
• Size: 25 cm
• Classification:
  • DC23 : 660.04
  • LCC : MLCM 2024/41107 (T)
• Subject Headings:
  • LCSH : Chemical vapor deposition
  • LCSH : Catalysts