Micromachining and microfabrication process technology and devices : 7-9 November 2001, Nanjing, China

著者

• Tien, Norman C.
• Huang, Qing-An

書誌事項

Micromachining and microfabrication process technology and devices : 7-9 November 2001, Nanjing, China

Norman C. Tien, Qing-An Huang, chairs/editors ; sponsored and organized by SPIE--the International Society for Optical Engineering, SEU... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4601）

SPIE, c2001

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BB29822614
• ISBN:
  • 0819443409
• LCCN: 2002282193
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: xi, 440 p.
• 大きさ: 30 cm
• 分類:
  • LCC : TJ1191.5
  • DC21 : 671.3/5
• 件名:
  • LCSH : Micromachining -- Congresses
  • LCSH : Microfabrication -- Congresses
  • LCSH : Electromechanical devices -- Design and construction -- Congresses
• 親書誌ID:
  • BA0022700X