Microlithography : science and technology

著者

• Smith, Bruce W.
• Suzuki, Kazuaki

書誌事項

Microlithography : science and technology

edited by Bruce W. Smith and Kazuaki Suzuki

CRC Press, Taylor & Francis Group, 2020

3rd ed

• : hbk

注記

Includes bibliographical references and index

• NII書誌ID(NCID): BC02482046
• ISBN:
  • 9781439876756
• LCCN: 2019053732
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Boca Raton, Fla.
• ページ数/冊数: xi, 837 p.
• 大きさ: 27 cm
• 分類:
  • LCC : TK7836
  • DC23 : 621.3815/31
• 件名:
  • LCSH : Microlithography -- Industrial applications
  • LCSH : Integrated circuits -- Masks
  • LCSH : Metal oxide semiconductors, Complementary -- Design and construction
  • LCSH : Manufacturing processes