Modeling aspects in optical metrology : 18-19 June 2007, Munich, Germany

著者

• Modeling Aspects in Optical Metrology
• Bosse, Harald
• Bodermann, Bernd
• Silver, Richard M.
• SPIE Europe
• European Optical Society
• Wissenschaftliche Gesellschaft Lasertechnik e.V.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Modeling aspects in optical metrology : 18-19 June 2007, Munich, Germany

Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society, WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 6617）

SPIE, c2007

注記

Includes bibliographical references and author index

内容説明・目次

内容説明

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

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詳細情報

• NII書誌ID(NCID): BC02904759
• ISBN:
  • 9780819467591
• LCCN: 2007281789
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: 1 v. (various pagings)
• 大きさ: 28 cm
• 分類:
  • LCC : QC367
  • DC22 : 681/.25
• 件名:
  • LCSH : Optical measurements -- Congresses
  • LCSH : Integrated circuits -- Congresses
  • LCSH : Semiconductors -- Design and construction -- Congresses
• 親書誌ID:
  • BA0022700X