Modeling aspects in optical metrology : 18-19 June 2007, Munich, Germany

著者

• Modeling Aspects in Optical Metrology
• Bosse, Harald
• Bodermann, Bernd
• Silver, Richard M.
• SPIE Europe
• European Optical Society
• Wissenschaftliche Gesellschaft Lasertechnik e.V.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Modeling aspects in optical metrology : 18-19 June 2007, Munich, Germany

Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society, WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 6617）

SPIE, c2007

注記

Includes bibliographical references and author index

詳細情報

• NII書誌ID(NCID): BC02904759
• ISBN:
  • 9780819467591
• LCCN: 2007281789
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: 1 v. (various pagings)
• 大きさ: 28 cm
• 分類:
  • LCC : QC367
  • DC22 : 681/.25
• 件名:
  • LCSH : Optical measurements -- Congresses
  • LCSH : Integrated circuits -- Congresses
  • LCSH : Semiconductors -- Design and construction -- Congresses
• 親書誌ID:
  • BA0022700X