Modeling aspects in optical metrology : 18-19 June 2007, Munich, Germany

Author(s)

• Modeling Aspects in Optical Metrology
• Bosse, Harald
• Bodermann, Bernd
• Silver, Richard M.
• SPIE Europe
• European Optical Society
• Wissenschaftliche Gesellschaft Lasertechnik e.V.
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Modeling aspects in optical metrology : 18-19 June 2007, Munich, Germany

Harald Bosse, Bernd Bodermann, Richard M. Silver, editors ; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society, WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 6617）

SPIE, c2007

Note

Includes bibliographical references and author index

Details

• NCID: BC02904759
• ISBN:
  • 9780819467591
• LCCN: 2007281789
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: 1 v. (various pagings)
• Size: 28 cm
• Classification:
  • LCC : QC367
  • DC22 : 681/.25
• Subject Headings:
  • LCSH : Optical measurements -- Congresses
  • LCSH : Integrated circuits -- Congresses
  • LCSH : Semiconductors -- Design and construction -- Congresses
• Parent Bibliography ID:
  • BA0022700X