Instrumentation, metrology, and standards for nanomanufacturing : 29-30 August 2007, San Diego, California, USA

著者

• Instrumentation, Metrology, and Standards for Nanomanufacturing
• Postek, Michael T.
• Allgair, John A.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Instrumentation, metrology, and standards for nanomanufacturing : 29-30 August 2007, San Diego, California, USA

Michael T. Postek, John A. Allgair, editors ; sponsored and published by SPIE

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 6648）

SPIE, c2007

• : pbk

注記

Includes bibliographical references and author index

詳細情報

• NII書誌ID(NCID): BC03102468
• ISBN:
  • 9780819467966
• LCCN: 2010287800
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: 1 v. (various pagings)
• 大きさ: 28 cm
• 分類:
  • LCC : TA418.9.N35
• 件名:
  • LCSH : Nanostructured materials -- Congresses
  • LCSH : Microfabrication -- Congresses
  • LCSH : Nanomanufacturing -- Congresses
• 親書誌ID:
  • BA0022700X