Instrumentation, metrology, and standards for nanomanufacturing : 29-30 August 2007, San Diego, California, USA

Author(s)

• Instrumentation, Metrology, and Standards for Nanomanufacturing
• Postek, Michael T.
• Allgair, John A.
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Instrumentation, metrology, and standards for nanomanufacturing : 29-30 August 2007, San Diego, California, USA

Michael T. Postek, John A. Allgair, editors ; sponsored and published by SPIE

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 6648）

SPIE, c2007

• : pbk

Note

Includes bibliographical references and author index

Details

• NCID: BC03102468
• ISBN:
  • 9780819467966
• LCCN: 2010287800
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: 1 v. (various pagings)
• Size: 28 cm
• Classification:
  • LCC : TA418.9.N35
• Subject Headings:
  • LCSH : Nanostructured materials -- Congresses
  • LCSH : Microfabrication -- Congresses
  • LCSH : Nanomanufacturing -- Congresses
• Parent Bibliography ID:
  • BA0022700X