{"@context":{"owl":"http://www.w3.org/2002/07/owl#","bibo":"http://purl.org/ontology/bibo/","foaf":"http://xmlns.com/foaf/0.1/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/"},"@id":"https://ci.nii.ac.jp/ncid/BC03684476.json","@graph":[{"@id":"https://ci.nii.ac.jp/ncid/BC03684476#entity","@type":"bibo:Book","foaf:isPrimaryTopicOf":{"@id":"https://ci.nii.ac.jp/ncid/BC03684476.json"},"dc:title":[{"@value":"ノボラックレジスト : 材料とプロセスの最適化"},{"@value":"ノボラック レジスト : ザイリョウ ト プロセス ノ サイテキカ","@language":"ja-hrkt"}],"dc:publisher":[{"@value":"S&T出版"}],"dcterms:extent":"viii, 197 p","cinii:size":"30cm","dc:language":"jpn","dc:date":"2020","cinii:ncid":"BC03684476","cinii:ownerCount":"2","bibo:owner":[{"@id":"https://ci.nii.ac.jp/library/FA001109","@type":"foaf:Organization","foaf:name":"北海道大学 大学院工学研究科・工学部図書室","rdfs:seeAlso":{"@id":"https://opac.lib.hokudai.ac.jp/opac/opac_openurl/?ncid=BC03684476"}},{"@id":"https://ci.nii.ac.jp/library/FA001415","@type":"foaf:Organization","foaf:name":"東北大学 附属図書館 工学分館","rdfs:seeAlso":{"@id":"https://opac.library.tohoku.ac.jp/opac/opac_openurl/?ncid=BC03684476"}}],"prism:publicationDate":["2020.1"],"cinii:note":["参考文献: 章末","背表紙下にA137とあり"],"dc:subject":["NDLC:PA441","NDC10:578.4"],"foaf:topic":[{"@id":"https://ci.nii.ac.jp/books/search?q=%E6%84%9F%E5%85%89%E6%80%A7%E6%A8%B9%E8%84%82","dc:title":"感光性樹脂"},{"@id":"https://ci.nii.ac.jp/books/search?q=%E3%83%AA%E3%82%BD%E3%82%B0%E3%83%A9%E3%83%95%E3%82%A3%E3%83%BC","dc:title":"リソグラフィー"}],"dcterms:hasPart":[{"@id":"urn:isbn:9784907002794"}]}]}